Semiconductor or liquid crystal producing device

Details Semiconductor or liquid crystal producing device Semiconductor or liquid crystal producing device

2003-02-26

2010-10-05

MacArthur, Sylvia R. (Department: 1716)

Coating apparatus

Gas or vapor deposition

With treating means

C156S345520

Reexamination Certificate

active

07806984

ABSTRACT:
An apparatus for manufacturing a semiconductor or liquid crystal has, within a reaction chamber1to which a reactive gas is supplied, a ceramic holder2having a resistive heating element7embedded therein; and further comprises a ceramic cylindrical support member3one end of which supports the ceramic holder2and the other end of which is fixed to a portion of the reaction chamber1, and an inert gas supply tube4and inert gas evacuation tube5each having an opening inside the cylindrical support member3. It is preferable that the inert gas within the cylindrical support member3be maintained at less than 0.1 MPa (one atmosphere). By means of such an arrangement, oxidation and corrosion of electrodes provided on the rear surface of the ceramic holder can be prevented, without an oxidation-resistant seal or corrosion-resistant seal being applied. The semiconductor or liquid crystal manufacturing apparatus also ensures the thermal uniformity in the ceramic holder and eliminates useless power consumption. Moreover, the apparatus size can be reduced, and manufacturing costs can be decreased.

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Merriam-Webster On-line. www.m-w.com. “Embedded”.
Merriam-Webster Collegiate Dictionary. 1999, Merriam-Webster. Inc. 10th Ed.“Embed”, p. 376. (recited as 2 pages).
“Ceramic” Taken from www.wikipedia.com on Aug. 27, 2008, page last modified Aug. 20, 2008 and retrieved Aug. 27, 2008.
“embedded”. Merriam-Webster's Collegiate Dictionary., 10thEdition. Merriam Webster. (1993) also found on www.m-w.com/dicitionary/embed.
Human Translation of JP 03-034540 held to Yoshiyuki published Feb. 14, 1991.

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