Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2007-03-20

2010-11-02

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S077000

Reexamination Certificate

active

07826035

ABSTRACT:
An array of individually controllable elements includes elements, each formed of a stack of layers of dielectric material. At least one layer is an electro-optical material. The at least one layer's refractive index for radiation that is plane polarized in a given direction can be changed by application of a voltage in order to change the reflection/transmission characteristic of the boundary between this layer and the adjacent layer.

REFERENCES:
patent: 3946370 (1976-03-01), Schmidt et al.
patent: 4786128 (1988-11-01), Birnbach
patent: 4790635 (1988-12-01), Apsley
patent: 4796982 (1989-01-01), Kitabatake et al.
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5500736 (1996-03-01), Koitabashi et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5530482 (1996-06-01), Gove et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5608575 (1997-03-01), Suzuki
patent: 5677703 (1997-10-01), Bhuva et al.
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5982553 (1999-11-01), Bloom et al.
patent: 5989752 (1999-11-01), Chiu
patent: 6084656 (2000-07-01), Choi et al.
patent: 6133986 (2000-10-01), Johnson
patent: 6177980 (2001-01-01), Johnson
patent: 6211993 (2001-04-01), Wang et al.
patent: 6291110 (2001-09-01), Cooper et al.
patent: 6687041 (2004-02-01), Sandstrom
patent: 6747783 (2004-06-01), Sandstrom
patent: 6770068 (2004-08-01), Ruiz et al.
patent: 6795169 (2004-09-01), Tanaka et al.
patent: 6798550 (2004-09-01), Wang et al.
patent: 6806897 (2004-10-01), Kataoka et al.
patent: 6811953 (2004-11-01), Hatada et al.
patent: 6870554 (2005-03-01), Jain
patent: 6870601 (2005-03-01), Liebregts et al.
patent: 7196772 (2007-03-01), Bleeker
patent: 2004/0239908 (2004-12-01), Bleeker et al.
patent: 2005/0007572 (2005-01-01), George et al.
patent: 0154 504 (1985-09-01), None
patent: 1 530 092 (2005-05-01), None
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
patent: WO 98/38597 (1998-09-01), None
European Search Report from European Patent Application No. 04256798.2 filed Feb. 14, 2005, 4 pgs.
European Search 03257056.6 filed Jul. 9, 2004, 10 pages.

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