Device for gripping and holding substrates

Details Device for gripping and holding substrates Device for gripping and holding substrates

1997-02-18

1999-03-02

Bucci, David A.

Handling: hand and hoist-line implements

Grapple

Expanding

C23C 1450, B23Q 308

Patent

active

058760822

ABSTRACT:
A device 1 for gripping and holding substrates 2 with one or several substrate holders 5 arranged in a vacuum chamber 4, 4', 4" and one or several displaceably arranged grippers 3, which can be displaced into a first position through the action of an operating pressure or against the action of a spring 6, and into a second position through the action of a diaphragm 7, which can be exposed to a pneumatic pressure P.sub.a and/or to an operating element 8 cooperating with it, wherein the substrate 2 is held when the diaphragm is in a first position and the substrate 2 is released for being further transported when the diaphragm is in a second position. The diaphragm 7 is integrated into the vacuum chamber in such a way that in an operating position it is exposed to atmospheric pressure P.sub.a on the one side 9 and on the other side 10 to vacuum pressure P.sub.v, and in a second position is exposed to vacuum pressure P.sub.v on both sides.

REFERENCES:
patent: 4948187 (1990-08-01), Blaseck
patent: 5637200 (1997-06-01), Tsymberov

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