Method of monitoring PCMO precursor synthesis

Details Method of monitoring PCMO precursor synthesis Method of monitoring PCMO precursor synthesis

2006-04-11

2009-12-01

Jolley, Kirsten C (Department: 1792)

Coating processes

Measuring, testing, or indicating

C427S240000, C427S595000, C118S688000, C118S712000

Reexamination Certificate

active

07625595

ABSTRACT:
A method of monitoring synthesis of PCMO precursor solutions includes preparing a PCMO precursor solution and withdrawing samples of the precursor solution at intervals during a reaction phase of the PCMO precursor solution synthesis. The samples of the PCMO precursor solution are analyzed by UV spectroscopy to determine UV transmissivity of the samples of the PCMO precursor solution and the samples used to form PCMO thin films. Electrical characteristics of the PCMO thin films formed from the samples are determined to identify PCMO thin films having optimal electrical characteristics. The UV spectral characteristics of the PCMO precursor solutions are correlated with the PCMO thin films having optimal electrical characteristics. The UV spectral characteristics are used to monitor synthesis of future batches of the PCMO precursor solutions, which will result in PCMO thin films having optimal electrical characteristics.

REFERENCES:
patent: 2003/0108670 (2003-06-01), Zhuang et al.
patent: 2004/0170761 (2004-09-01), Zhuang et al.

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