Lithographically-defined multi-standard multi-frequency...

Details Lithographically-defined multi-standard multi-frequency... Lithographically-defined multi-standard multi-frequency...

2008-01-18

2009-12-29

Takaoka, Dean O (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S197000

Reexamination Certificate

active

07639105

ABSTRACT:
Disclosed are micromechanical resonator apparatus having features that permit multiple resonators on the same substrate to operate at different operating frequencies. Exemplary micromechanical resonator apparatus includes a support substrate and suspended micromechanical resonator apparatus having a resonance frequency. In one embodiment, the suspended micromechanical resonator apparatus comprises a device substrate that is suspended from and attached to the support substrate, a piezoelectric layer formed on the suspended device substrate, and a plurality of interdigitated upper electrodes formed on the piezoelectric layer. In another embodiment, the suspended micromechanical resonator apparatus comprises a device substrate that is suspended from and attached to the support substrate, a lower electrode formed on the suspended device substrate, a piezoelectric layer formed on the lower electrode, and a plurality of interdigitated upper electrodes formed on the piezoelectric layer. The substrate may comprise a silicon substrate, or a semiconductor-on-insulator substrate, such as a diamond on silicon substrate. Additionally, lateral frequency-adjusting electrodes may be disposed adjacent to the resonator apparatus that are separated therefrom by a capacitive gap, and which are configured to receive a direct current voltage that adjusts the resonance frequency of the resonator apparatus.

REFERENCES:
patent: 5640133 (1997-06-01), MacDonald et al.
patent: 7492241 (2009-02-01), Piazza et al.
patent: 2008/0079515 (2008-04-01), Ayazi et al.
patent: 2009/0072663 (2009-03-01), Ayazi et al.

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