Optical sensor for measuring thin film disposition in real time

Details Optical sensor for measuring thin film disposition in real time Optical sensor for measuring thin film disposition in real time

2007-11-05

2009-12-08

Petkovsek, Daniel (Department: 2874)

Optical waveguides

Optical waveguide sensor

C356S038000, C356S519000

Reexamination Certificate

active

07630590

ABSTRACT:
A novel optical sensor is used for monitoring the thickness of deposited thin film in real time. The sensor operates on the basic principle of a Fabry-Perot interferometer. A MEMS based design is used to fabricate the optical fiber sensor. Detail analytical results provide the theoretical model based on the Fabry-Perot interferometer, and show that the optical fiber sensor can successfully monitor and measure the thickness of deposited thin-film in real time. Since thin-film will be deposited simultaneously on both surfaces of sensor head and targeted silicon wafer, the sensor can be used in the fabrication of IC and MEMS devices, as well as in proteomics, nano-sensors, and biosensors.

REFERENCES:
patent: 6204922 (2001-03-01), Chalmers
patent: 6278809 (2001-08-01), Johnson et al.
patent: 2006/0193550 (2006-08-01), Wawro et al.
patent: 2007/0070356 (2007-03-01), Tan et al.

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