Interferometer system for monitoring an object

Details Interferometer system for monitoring an object Interferometer system for monitoring an object

2008-03-19

2009-12-29

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S479000, C356S482000

Reexamination Certificate

active

07639367

ABSTRACT:
In general, in one aspect, the invention features a system including a light source, a plurality of interferometers configured to receive light from the light source and to form output light, each interferometer including a first optic and a second optic, the first and second optics configured to be mounted on a first object and a second object, respectively, where first object is moveable with respect to the second object, the first and second optics being configured introduce an optical path length difference (OPD) between two components of the light to form the output light, the OPD being related to the position of the first optic with respect to the second optic. The system further includes a plurality of detectors configured to detect the output light from the interferometers, a modulation apparatus in the optical path between the light source and the detectors, the modulation apparatus being configured to vary an OPD between the two components of the light over a range including OPDs for which a net OPD of the output light from at least one of the interferometers at the detectors is zero, a plurality of waveguides configured to direct light between the interferometers, the modulation apparatus, and the detectors, and an electronic controller in communication with the detectors, the electronic controller being configured to determine information about a position of the first object based on the detected output light from at least one of the interferometers.

REFERENCES:
patent: 4699513 (1987-10-01), Brooks et al.
patent: 4928527 (1990-05-01), Burger et al.
patent: 5202939 (1993-04-01), Belleville et al.
patent: 5539517 (1996-07-01), Cabib et al.
patent: 5541730 (1996-07-01), Chaney
patent: 5596409 (1997-01-01), Marcus et al.
patent: 5659392 (1997-08-01), Marcus et al.
patent: 5898501 (1999-04-01), Suzuki et al.
patent: 6034774 (2000-03-01), Marcus et al.
patent: 6038027 (2000-03-01), Marcus et al.
patent: 6067161 (2000-05-01), Marcus et al.
patent: 6075601 (2000-06-01), Marcus et al.
patent: 6082892 (2000-07-01), Adel et al.
patent: 6175669 (2001-01-01), Colston et al.
patent: 6181430 (2001-01-01), Meyer et al.
patent: 6359692 (2002-03-01), Groot
patent: 6370299 (2002-04-01), Green et al.
patent: 6490046 (2002-12-01), Drabarek et al.
patent: 6538746 (2003-03-01), Handrich
patent: 6721510 (2004-04-01), Graves et al.
patent: 6741355 (2004-05-01), Drabarek
patent: 6816264 (2004-11-01), Dobbs
patent: 6822745 (2004-11-01), De Groot
patent: 6842254 (2005-01-01), Van Neste et al.
patent: 6847453 (2005-01-01), Bush
patent: 6901176 (2005-05-01), Balachandran et al.
patent: 6977730 (2005-12-01), Evans
patent: 7012700 (2006-03-01), de Groot
patent: 7046371 (2006-05-01), de Lega
patent: 7187453 (2007-03-01), Belleville
patent: 7206076 (2007-04-01), Blalock
patent: 7355684 (2008-04-01), Jeffers et al.
patent: 7372575 (2008-05-01), Fujita
patent: 7417740 (2008-08-01), Alphonse et al.
patent: 7417743 (2008-08-01), De Groot
patent: 7428052 (2008-09-01), Fujita
patent: 7446881 (2008-11-01), Suzuki et al.
patent: 7477399 (2009-01-01), Takahashi
patent: 7488929 (2009-02-01), Townley-Smith
patent: 7492468 (2009-02-01), Henselmans et al.
patent: 7492469 (2009-02-01), De Groot
patent: 2002/0085208 (2002-07-01), Hauger et al.
patent: 2003/0223079 (2003-12-01), Hill
patent: 2005/0232531 (2005-10-01), Hadley et al.
patent: 2006/0103850 (2006-05-01), Alphonse et al.
patent: 2007/0127034 (2007-06-01), Koshimizu et al.
International Search Report.
M. Marcus, “Fiber optic interferometry for industrial process monitoring and control applications,” Proc. Spie, vol. 4578, pgs. 136-144 (2002).
Peter de Groot et al., “Laser Gage Using Chirped Synthetic Wavelength Interferometry,” Proceedings of SPIE 1821-12:1-10 (1993).
O.P. Lay et al., “Coherent Range-Gated Laser Displacement Metrology with Compact Optical Head,” Optics Letters 32:2933-2935 (2007).
Jidong Weng et al., “A Compact All-Fiber Displacement Interferometer for Measuring the Foil Velocity Diven by Laser,” Review of Scientific Instruments 79:113101-11303 (2008).

Affiliated with

Also associated with

Rating

Interferometer system for monitoring an object does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Interferometer system for monitoring an object, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Interferometer system for monitoring an object will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4144902