Piezoelectric thin film device having a drive section with a...

Wave transmission lines and networks – Coupling networks – Electromechanical filter

Reexamination Certificate

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C310S312000, C333S189000

Reexamination Certificate

active

07598826

ABSTRACT:
There is provided a piezoelectric thin film device with its frequency impedance characteristic unsusceptible to spuriousness.A film bulk acoustic resonator has a configuration where an adhesive layer, a lower electrode, a piezoelectric thin film, and an upper electrode are laminated in this order on a support substrate. A drive section of the upper electrode and a drive section of the lower electrode are opposed to each other with the piezoelectric thin film interposed therebetween. The respective drive section has a slender two-dimensional shape, with magnitude in its longitudinal direction being not less than twice, more desirably four times, and further desirably ten times, as large as magnitude in its widthwise direction.

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