Method of manufacturing a thin film magnetic head

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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Details

C029S603230, C029S603250, C360S123110, C360S123390

Reexamination Certificate

active

07549216

ABSTRACT:
The invention is directed to a method for manufacturing a thin film magnetic head comprising forming a first coil, a first pole piece and a first back gap piece on a first insulating film formed on a surface of a first magnetic film, so that the first coil, the first pole piece and the first back gap piece have a taper angle making a sectional shape wider in a lower part and narrower in an upper part; forming a second insulating film on surfaces of the first coil, the first pole piece and the first back gap piece; forming a first seed film on the second insulating film; growing a first plating film for a second coil on the first seed film in an area where the second coil is to be formed, so that the first plating film fills up spaces between the first pole piece and an outermost coil turn of the first coil, between coil turns of the first coil, and between an innermost coil turn of the first coil and the first back gap piece; and flattening the first plating film by polishing, so that to obtain a pattern of the second coil.

REFERENCES:
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patent: 5875080 (1999-02-01), Seagle
patent: 6185068 (2001-02-01), Fujita et al.
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patent: 6204997 (2001-03-01), Sasaki
patent: 6226860 (2001-05-01), Burbank
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patent: 2003-242609 (2003-08-01), None
U.S. Appl. No. 11/377,267, filed Mar. 17, 2006, Sasaki et al.
U.S. Appl. No. 11/110,743, filed Apr. 21, 2005, Sasaki et al.

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