Titanium complexes, their production methods,...

Details Titanium complexes, their production methods,... Titanium complexes, their production methods,...

2006-11-01

2009-12-15

Gonzalez, Porfirio Nazario (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

C427S248100

Reexamination Certificate

active

07632958

ABSTRACT:
Objects of the present invention are to provide a novel titanium complex that has good vaporization characteristics and an excellent thermal stability, and becomes a raw material for forming a titanium-containing thin film by methods such as CVD method or ALD method, its production method, a titanium-containing thin film formed using the same, and its formation method. In the invention, a titanium complex represented by the general formula (1) is produced by reacting a diimine represented by the general formula (2) and metallic lithium, and then reacting a tetrakisamide complex represented by the general formula (3).(In the formulae, R1and R4represent an alkyl group having from 1 to 6 carbon atoms. R2and R3each independently represents a hydrogen atom or an alkyl group having from 1 to 3 carbon atoms. R5and R6each independently represents an alkyl group having from 1 to 4 carbon atoms.).

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Extended European Search Report dated Sep. 23, 2008.

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