Exposure apparatus and method of manufacturing device

Details Exposure apparatus and method of manufacturing device Exposure apparatus and method of manufacturing device

2008-08-04

2009-12-29

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

07639344

ABSTRACT:
This invention provides a positioning apparatus which can safely stop a movable body irrespective of its driving status. This invention relates to a positioning apparatus which positions a movable body (4) of an exposure apparatus and includes a driver (2) which drives the movable body (4), a power source (3) which supplies power to the driver (2), and a controller (1). The controller (1) stops the power supply from the power source (3) to the driver (2) after the elapse of a time period, which is determined in accordance with the driving status of the movable body (4) driven by the driver (2), in response to a stop instruction signal (11) which instructs to stop the driving of the movable body (4).

REFERENCES:
patent: 5040431 (1991-08-01), Sakino et al.
patent: 5661388 (1997-08-01), Kurosawa
patent: 6566770 (2003-05-01), Nakamura
patent: 07-191757 (1995-07-01), None
patent: 407191757 (1995-07-01), None
patent: 07-328966 (1995-12-01), None
patent: 2001-060614 (2001-03-01), None
European Search Report issued on Nov. 12, 2008 for European Patent Application No. EP 08162028.

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