MEMS inertial delay device

Details MEMS inertial delay device MEMS inertial delay device

2005-01-06

2009-02-24

Fischer, Andrew J. (Department: 3621)

Ammunition and explosives

Igniting devices and systems

Arming devices

C200S061530, C073S514380

Reexamination Certificate

active

07493858

ABSTRACT:
A MEMS inertial delay device having a substrate layer, an intermediate layer and a device layer. A plurality of freely moveable interlocking masses are formed in the device layer along with springs which connect the masses to first and second supports. Movement of a first one of the interlocked masses, due to a shock event, allows subsequent masses to move, with a last mass including an activation member, movement of which causes operation of a mechanism, such as movement of a lock in a safe/arm arrangement in a munition round.

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