Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-02-13
2009-08-11
Sugarman, Scott J (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000
Reexamination Certificate
active
07573631
ABSTRACT:
One embodiment relates to a hybrid micro electromechanical systems (MEMS) based spatial light modulator (SLM) capable of operating in both analog and digital modes. The hybrid SLM includes a substrate having an upper surface, a number of movable ribbons disposed a predetermined distance above the upper surface of the substrate, the ribbons having light reflective surfaces formed on their upper side facing away from the upper surface of the substrate, and a number of standoffs having a predetermined height positioned between a lower surface of the movable ribbons and the upper surface of the substrate. The standoffs are configured to limit the ribbon deflection of movable ribbons toward the upper surface of the substrate when the SLM is operated in digital mode with snap-down voltages applied between the ribbon and drive electronics in the substrate. Other embodiments are also disclosed.
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Nuttle William E.
Pinkney Dawayne A
Silicon Light Machines Corporation
Sugarman Scott J
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