Scanning probe microscope fine-movement mechanism and...

Details Scanning probe microscope fine-movement mechanism and... Scanning probe microscope fine-movement mechanism and...

2007-08-21

2009-11-10

Nguyen, Kiet T (Department: 2881)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

07614288

ABSTRACT:
An inching mechanism for a scanning probe microscope capable of performing measurement with high precision while enhancing the scanning speed by a probe furthermore, and a scanning probe microscope comprising it. The inching mechanism for a scanning probe microscope which is provided in a scanning probe microscope (SPM) (1) having a stage (16) for mounting a sample S, and a probe (20) approaching closely to or touching the surface of the sample S, characterized in that the inching mechanism comprises a first drive section and a second drive section provided independently, a probe inching mechanism (26) having the first drive section and inching, by the first drive section, the probe (20) in the X direction and Y direction parallel with the surface of the sample S and intersecting each other, and a stage inching mechanism (27) having the second drive section and inching, by the second drive section, the stage (16) in the Z direction perpendicular to the surface of the sample S.

REFERENCES:
patent: 5808302 (1998-09-01), Binnig et al.
patent: 6127681 (2000-10-01), Sato et al.
patent: 6229607 (2001-05-01), Shirai et al.
patent: 6246652 (2001-06-01), Kikukawa et al.
patent: 6928863 (2005-08-01), Massie
patent: 08-285865 (1996-11-01), None
patent: 09-033543 (1997-02-01), None
patent: 10-090610 (1998-04-01), None
patent: 11-133040 (1999-05-01), None
patent: 2000-346784 (2000-12-01), None
patent: 2004-257849 (2004-09-01), None
International Search Report for PCT/JP2006/302316 dated 2006.

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