Surface-emission laser diode and surface-emission laser...

Coherent light generators – Particular active media – Semiconductor

Reexamination Certificate

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C372S046015, C372S050124

Reexamination Certificate

active

07542499

ABSTRACT:
A surface-emission laser diode includes an active layer, a pair of cavity spacer layers formed at both sides of the active layer, a current confinement structure defining a current injection region into the active layer, and a pair of distributed Bragg reflectors opposing with each other across a structure formed of the active layer and the cavity spacer layers, the current confinement structure being formed by a selective oxidation process of a semiconductor layer, the pair of distributed Bragg reflectors being formed of semiconductor materials, wherein there is provided a region containing an oxide of Al and having a relatively low refractive index as compared with a surrounding region in any of the semiconductor distributed Bragg reflector or the cavity spacer layer in correspondence to a part spatially overlapping with the current injection region in a laser cavity direction.

REFERENCES:
patent: 7170916 (2007-01-01), Kim
patent: 2001/0030319 (2001-10-01), Sato et al.
patent: 11-054838 (1999-02-01), None
patent: 2001-060739 (2001-03-01), None
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K. D. Choquette, et al., “Low threshold voltage vertical-cavity lasers fabricated by selective oxidation,” Electronic Letters, Nov. 24, 1994, vol. 30, No. 24, pp. 2043-2044.
L. W. Tu, et al., “High Temperature Performance Of Three-Quantum-Well Vertical-Cavity Top-Emitting Lasers,” Electronic Letters, Feb. 28, 1991, vol. 27, No. 5, pp. 457-458.
T. H. Oh, et al., “Cavity-Induced Antiguiding in a Selectively Oxidized Vertical-Cavity Surface-Emitting Laser,” IEEE Photonics Technology Letters, vol. 10, No. 1, Jan. 1998, pp. 12-14.
D. Zhou, et al., “Simplified-antiresonant reflecting optical waveguide-type vertical-cavity surface-emitting lasers,” Applied Physics Letters, vol. 76, No. 13, Mar. 27, 2000, pp. 1659-1661.
D. Zhou, et al., “High-Power Single-Mode Antiresonant Reflecting Optical Waveguide-Type Vertical-Cavity Surface-Emitting Lasers,” IEEE Journal of Quantum Electronics, vol. 38, No. 12, Dec. 2002, pp. 1599-1606.

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