Device for controlling the frequency of resonance of an...

Wave transmission lines and networks – Coupling networks – Electromechanical filter

Reexamination Certificate

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C333S188000

Reexamination Certificate

active

07616078

ABSTRACT:
A device for controlling the frequency of resonance of an oscillating micro-electromechanical system includes: a microstructure, having a first body and a second body, which is capacitively coupled to the first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance, a relative displacement between the second body and the first body being detectable from outside; and an amplifier coupled to the microstructure for detecting the relative displacement. DC decoupling elements are arranged between the amplifier and the microstructure.

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