Piezoelectric thin-film resonator and filter

Details Piezoelectric thin-film resonator and filter Piezoelectric thin-film resonator and filter

2006-05-09

2009-08-25

Dougherty, Thomas M (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S320000, C310S324000, C310S363000

Reexamination Certificate

active

07579761

ABSTRACT:
A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the lower electrode; and an upper electrode that is formed on the piezoelectric film. In the piezoelectric thin-film resonator, the upper electrode has a greater film thickness than the lower electrode.

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Chinese Office Action, dated Jul. 11, 2008, 12 pages.
H.P. Löbl et al., “Piezoelectric Materials For BAW Resonators And Filters”, 2001, pp. 807-811, IEEE Ultrasonics Symposium, United States of America.

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