Bulk acoustic resonator and filter element

Details Bulk acoustic resonator and filter element Bulk acoustic resonator and filter element

2006-11-01

2009-11-17

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S189000, C310S335000

Reexamination Certificate

active

07619493

ABSTRACT:
A bulk acoustic resonator has an acoustic reflector portion formed on a substrate and including one or more low acoustic impedance layers and one or more high acoustic impedance layers having a higher acoustic impedance than the low acoustic impedance layer which are disposed in stacked relation and an acoustic resonator portion formed on the acoustic reflector portion and having a piezoelectric film. At least one of the low acoustic impedance layers is made of silicon.

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patent: 2002-251190 (2002-09-01), None

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