Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2005-12-15
2009-11-24
Dougherty, Thomas M (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S363000, C310S364000
Reexamination Certificate
active
07622850
ABSTRACT:
A piezoelectric device includes: a substrate; a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound; a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure; and a second conductive layer electrically connected with the piezoelectric layer.
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Iwashita Setsuya
Kijima Takeshi
Ohashi Koji
Dougherty Thomas M
Harness & Dickey & Pierce P.L.C.
Seiko Epson Corporation
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