Method for constructing a magnetic write pole for a...

Details Method for constructing a magnetic write pole for a... Method for constructing a magnetic write pole for a...

2006-09-21

2009-08-25

Kim, Paul D (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603130, C029S603140, C029S603150, C029S603180, C216S065000, C360S121000, C360S122000, C360S317000, C451S005000, C451S041000

Reexamination Certificate

active

07578049

ABSTRACT:
A method for manufacturing a write pole for a perpendicular magnetic write head. The method includes forming a mask structure over a full film layer of magnetic write pole material. A layer of hard mask material such as conformally deposited alumina is then deposited full film over the mask and write pole material. An ion mill, such as in an Ar or CHF3 chemistry is then used to preferentially remove horizontally disposed portions of the alumina layer (hard mask layer), thereby forming vertical hard mask walls at the sides of the mask structure. An ion mill is then used to form the write pole, with the alumna side walls providing excellent masking for forming well defined write pole edges. A relatively gentle clean up process can then be performed to remove the remaining mask material and side walls.

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