Method of forming micro-lenses

Details Method of forming micro-lenses Method of forming micro-lenses

2003-11-17

2009-08-11

Olsen, Allan (Department: 1792)

Etching a substrate: processes

Forming or treating optical article

Lens

C216S057000

Reexamination Certificate

active

07572385

ABSTRACT:
A method of fabricating micro-lenses is provided. A first layer is formed on a substrate. The first layer is comprised of a first material and the substrate is comprised of a second material. An opening is formed in the first layer and an etchant is provided in the opening to etch both the substrate and the first layer to form a first mold for a first micro-lens. The etchant etches the first layer at a different rate than the substrate. A lens material is added to the etched molds to form micro-lenses.

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U.S. Appl. No. 10/721,165, Boettiger et al.
U.S. Appl. No. 10/667,390, Jiang et al.

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