Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate
2008-01-08
2009-12-08
Sohn, Seung C (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
C355S053000
Reexamination Certificate
active
07629563
ABSTRACT:
A method is provided for adjusting a first light intensity distribution formed on a pupil plane of an illumination apparatus. The method includes measuring a first light intensity distribution; obtaining a first light intensity radial distribution and a second light intensity radial distribution; obtaining a first cumulative light quantity distribution in a radial direction and a second cumulative light quantity distribution in the radial direction; obtaining a difference at each of at least three points between the first cumulative light quantity distribution in the radial direction and the second cumulative light quantity distribution in the radial direction; and adjusting the first light intensity distribution based on the difference between the first cumulative light quantity distribution in the radial direction and the second cumulative light quantity distribution in the radial direction.
REFERENCES:
patent: 5345292 (1994-09-01), Shiozawa et al.
patent: 5726740 (1998-03-01), Shiozawa et al.
patent: 2006/0066193 (2006-03-01), Ranish et al.
patent: 5-283317 (1993-10-01), None
patent: 2001-033875 (2001-02-01), None
Canon Kabushiki Kaisha
Canon U.S.A. Inc. I.P. Division
Sohn Seung C
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