Semiconductor device manufacturing: process – Making passive device – Resistor
Reexamination Certificate
2008-08-12
2009-11-10
Geyer, Scott B. (Department: 4148)
Semiconductor device manufacturing: process
Making passive device
Resistor
Reexamination Certificate
active
07615459
ABSTRACT:
A manufacturing method for a variable resistive element according to which a stable switching operation can be achieved with excellent reproducibility is provided. A conductive thin film is deposited on a semiconductor substrate and patterned to a predetermined form, and after that, a first interlayer insulating film is deposited. An opening is then created in a predetermined location on the first interlayer insulating film in such a manner that the upper surface of the conductive thin film is exposed and the thickness of the conductive thin film formed at the bottom of this opening is reduced through processing, and after that, an oxidation process is carried out on the periphery of the exposed conductive thin film. As a result, a variable resistor film is formed in the peripheral region of the opening, and this variable resistor film divides the conductive thin film into a first electrode and a second electrode.
REFERENCES:
patent: 6204139 (2001-03-01), Liu et al.
patent: 6815744 (2004-11-01), Beck et al.
patent: 2005/0153504 (2005-07-01), Kawazoe et al.
patent: 2006/0281277 (2006-12-01), Tamai et al.
patent: 2009/0097300 (2009-04-01), Ishihara et al.
patent: 2002-537627 (2002-11-01), None
Liu, S.Q. et al. , “Electric -pulse-induced reversible resistance change effect in magnetoresistive films,” Applied Physics Letter, vol. 76, pp. 2749-2751, 2000.
Baek I. G. et al., “Highly Scalable Non-volatile Resistive Memory using Simple Binary Oxide driven by Asymmetric Unipolar Voltage Pulses,” IEDM 04, pp. 587-590, 2004.
H. Pagnia et al., “Bistable Switching in Electroformed Metal-Insulator-Metal Devices,” Phys. Stat. Sol. (a), vol. 108, pp. 11-65, in 1988.
Hosoi Yasunari
Inoue Yushi
Ishihara Kazuya
Nakano Takashi
Ohnishi Tetsuya
Birch & Stewart Kolasch & Birch, LLP
Geyer Scott B.
Moore Whitney
Sharp Kabushiki Kaisha
LandOfFree
Manufacturing method for variable resistive element does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Manufacturing method for variable resistive element, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Manufacturing method for variable resistive element will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4120455