Interferometry systems and methods using spatial carrier...

Details Interferometry systems and methods using spatial carrier... Interferometry systems and methods using spatial carrier...

2006-02-15

2009-02-17

Lee, Hwa (Andrew) S (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S514000

Reexamination Certificate

active

07492469

ABSTRACT:
In general, in one aspect, the invention features an apparatus that includes an interferometer having a main cavity and an auxiliary reference surface, the main cavity including a partially reflective surface defining a primary reference surface and a test surface. The interferometer is configured to direct a primary portion of input electromagnetic radiation to the main cavity and an auxiliary portion of the input electromagnetic radiation to reflect from the auxiliary reference surface, wherein a first portion of the primary portion in the main cavity reflects from the primary reference surface and a second portion of the primary portion in the main cavity passes through the primary reference surface and reflects from the test surface. The interferometer is further configured to direct the electromagnetic radiation reflected from the test surface, the primary reference surface, and the auxiliary reference surface to a multi-element detector to interfere with one another to form an interference pattern. The auxiliary reference surface is tilted so that the paths of the electromagnetic radiation reflected from the primary reference surface and auxiliary reference are non-parallel at the multi-element detector and the auxiliary reference surface is in the path of the primary portion of the electromagnetic radiation.

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