Piezo-electric substrate and manufacturing method of the same

Details Piezo-electric substrate and manufacturing method of the same Piezo-electric substrate and manufacturing method of the same

2007-07-20

2009-08-04

Dougherty, Thomas M (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S311000, C310S363000

Reexamination Certificate

active

07569976

ABSTRACT:
A piezo-electric substrate is mainly comprised of a base material and a film formed on one main surface of the base material. In the base material, the main surface on which the film is formed is a roughed main surface. The piezo-electric substrate is obtained by forming the film comprised of a material with a coefficient of linear expansion smaller than a coefficient of linear expansion of the base material on the roughened main surface using a thermal spraying method.

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European Search Report dated Nov. 19, 2007.

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