Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate
2006-04-26
2009-11-10
Vanore, David A (Department: 2881)
Radiant energy
Irradiation of objects or material
Ion or electron beam irradiation
C250S309000, C250S492210, C250S306000, C250S370070, C257S429000
Reexamination Certificate
active
07615764
ABSTRACT:
The invention provides a cross section evaluating apparatus capable of analyzing the cross sectional structure in a state where the temperature of the specimen is regulated. There is disclosed an information acquisition apparatus comprising a stage for placing the specimen, temperature regulation means for regulating the temperature of the specimen, exposure means for exposing a surface, of which information is desired, of the specimen, and information acquisition means for acquiring information relating to the surface exposed by the exposure means.
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Motoi Taiko
Ueno Rie
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Maskell Michael
Vanore David A
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