Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-05-15
2009-06-16
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07548321
ABSTRACT:
A method for the high-precision measurement of coordinates on a substrate is disclosed. The substrate is placed on a stage moveable in X/Y coordinate directions. First, a plurality of images of a structure on a substrate are imaged by means of a 2-dimensional detector during the relative movement of a measuring objective in Z coordinate direction and the simultaneous movement of the stage in X and Y coordinate directions.
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Davidson Davidson & Kappel LLC
Lyons Michael A
Vistec Semiconductor Systems GmbH
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