Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2008-02-19
2009-12-29
Ghyka, Alexander G (Department: 2812)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S045000, C438S054000, C257SE25004, C257SE25009, C257SE27123
Reexamination Certificate
active
07638352
ABSTRACT:
The present invention is a method of manufacturing a photoelectric conversion device having a multilayered interconnection (wiring) structure disposed on a semiconductor substrate, including steps of forming a hole in a region of the interlayer insulation film corresponding to an electrode of the transistor; burying an electroconductive substance in the hole; forming a hydrogen supplying film; conducting a thermal processing at a first temperature to supply a hydrogen from the hydrogen supplying film to the semiconductor substrate; forming the multilayered interconnection structure using Cu in a wiring material; and forming a protective film covering the multilayered interconnection structure, wherein the step of forming the multilayered interconnection structure, and the step of forming the protective film are conducted at a temperature not higher than the first temperature.
REFERENCES:
patent: 2003/0197228 (2003-10-01), Okuda et al.
patent: 2007/0045687 (2007-03-01), Kumura et al.
patent: 2008/0096291 (2008-04-01), Takai et al.
patent: 2003-264277 (2003-09-01), None
patent: 2003-264281 (2003-09-01), None
patent: 2004-179329 (2004-06-01), None
patent: 2005-72541 (2005-03-01), None
patent: 2006-210685 (2006-08-01), None
Notification of Reason for Refusal dated Oct. 30, 2007, regarding Application No. 2007-044010.
Kojima Takeshi
Sawayama Tadashi
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Ghyka Alexander G
Mustapha Abdulfattah
LandOfFree
Method of manufacturing photoelectric conversion device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of manufacturing photoelectric conversion device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing photoelectric conversion device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4104747