Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-07-31
2009-08-25
Kim, Peter B (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S055000
Reexamination Certificate
active
07580114
ABSTRACT:
An exposure apparatus which exposes a substrate by projecting an image of a pattern, via an projection optical system and a liquid of a liquid immersion area formed on the substrate, onto the substrate, includes a liquid supply mechanism having supply ports for supplying the liquid on both sides of a projection area respectively and capable of simultaneously supplying the liquid from the supply ports, the image of the pattern being projected onto the projection area. The liquid supply mechanism supplies the liquid from only one of the supply ports disposed on the both sides when the mechanism starts to supply the liquid. The liquid may be supplied while moving an object such as a substrate placed to face the projection optical system. Accordingly, an optical path space on the image side of the projection optical system can be filled with the liquid quickly while suppressing formation of air bubbles.
REFERENCES:
patent: 4346164 (1982-08-01), Tabarelli et al.
patent: 4480910 (1984-11-01), Takanashi et al.
patent: 5610683 (1997-03-01), Takahashi
patent: 5715039 (1998-02-01), Fukuda et al.
patent: 5825043 (1998-10-01), Suwa
patent: 2002/0163629 (2002-11-01), Switkes et al.
patent: 2003/0030916 (2003-02-01), Suenaga
patent: 2003/0174408 (2003-09-01), Rostalski et al.
patent: 2004/0000627 (2004-01-01), Schuster
patent: 2004/0075895 (2004-04-01), Lin
patent: 2004/0109237 (2004-06-01), Epple et al.
patent: 2004/0114117 (2004-06-01), Bleeker
patent: 2004/0118184 (2004-06-01), Violette
patent: 2004/0119954 (2004-06-01), Kawashima et al.
patent: 2004/0125351 (2004-07-01), Krautschik
patent: 2004/0136494 (2004-07-01), Lof et al.
patent: 2004/0160582 (2004-08-01), Lof et al.
patent: 2004/0165159 (2004-08-01), Lof et al.
patent: 2004/0169834 (2004-09-01), Richter et al.
patent: 2004/0169924 (2004-09-01), Flagello et al.
patent: 2004/0180294 (2004-09-01), Baba-Ali et al.
patent: 2004/0180299 (2004-09-01), Rolland et al.
patent: 2004/0207824 (2004-10-01), Lof et al.
patent: 2004/0211920 (2004-10-01), Maria Derksen et al.
patent: 2004/0224265 (2004-11-01), Endo et al.
patent: 2004/0224525 (2004-11-01), Endo et al.
patent: 2004/0227923 (2004-11-01), Flagello et al.
patent: 2004/0233405 (2004-11-01), Kato et al.
patent: 2004/0253547 (2004-12-01), Endo et al.
patent: 2004/0253548 (2004-12-01), Endo et al.
patent: 2004/0257544 (2004-12-01), Vogel et al.
patent: 2004/0259008 (2004-12-01), Endo et al.
patent: 2004/0259040 (2004-12-01), Endo et al.
patent: 2004/0263808 (2004-12-01), Sewell
patent: 2004/0263809 (2004-12-01), Nakano
patent: 2005/0002004 (2005-01-01), Kolesnychenko et al.
patent: 2005/0007569 (2005-01-01), Streefkerk et al.
patent: 2005/0007570 (2005-01-01), Streefkerk et al.
patent: 2005/0018155 (2005-01-01), Cox et al.
patent: 2005/0018156 (2005-01-01), Mulkens et al.
patent: 2005/0024609 (2005-02-01), De Smit et al.
patent: 2005/0030497 (2005-02-01), Nakamura
patent: 2005/0030498 (2005-02-01), Mulkens
patent: 2005/0030506 (2005-02-01), Schuster
patent: 2005/0036121 (2005-02-01), Hoogendam et al.
patent: 2005/0036183 (2005-02-01), Yeo et al.
patent: 2005/0036184 (2005-02-01), Yeo et al.
patent: 2005/0036213 (2005-02-01), Mann et al.
patent: 2005/0037269 (2005-02-01), Levinson
patent: 2005/0042554 (2005-02-01), Dierichs et al.
patent: 2005/0046934 (2005-03-01), Ho et al.
patent: 2005/0048223 (2005-03-01), Pawloski et al.
patent: 2005/0068639 (2005-03-01), Pierrat et al.
patent: 2005/0073670 (2005-04-01), Carroll
patent: 2005/0084794 (2005-04-01), Meagley et al.
patent: 2005/0094116 (2005-05-01), Flagello et al.
patent: 2005/0100745 (2005-05-01), Lin et al.
patent: 2005/0110973 (2005-05-01), Streefkerk et al.
patent: 2005/0117224 (2005-06-01), Shafer et al.
patent: 2005/0122497 (2005-06-01), Lyons et al.
patent: 2005/0132914 (2005-06-01), Mulkens et al.
patent: 2005/0134815 (2005-06-01), Van Santen et al.
patent: 2005/0134817 (2005-06-01), Nakamura
patent: 2005/0141098 (2005-06-01), Schuster
patent: 2005/0145265 (2005-07-01), Ravkin et al.
patent: 2005/0145803 (2005-07-01), Hakey et al.
patent: 2005/0146694 (2005-07-01), Tokita
patent: 2005/0146695 (2005-07-01), Kawakami
patent: 2005/0147920 (2005-07-01), Lin et al.
patent: 2005/0153424 (2005-07-01), Coon
patent: 2005/0158673 (2005-07-01), Hakey et al.
patent: 2005/0164502 (2005-07-01), Deng et al.
patent: 2005/0174549 (2005-08-01), Duineveld et al.
patent: 2005/0175940 (2005-08-01), Dierichs
patent: 2005/0185269 (2005-08-01), Epple et al.
patent: 2005/0190435 (2005-09-01), Shafer et al.
patent: 2005/0190455 (2005-09-01), Rostalski et al.
patent: 2005/0205108 (2005-09-01), Chang et al.
patent: 2005/0213061 (2005-09-01), Hakey et al.
patent: 2005/0213072 (2005-09-01), Schenker et al.
patent: 2005/0217135 (2005-10-01), O'Donnell et al.
patent: 2005/0217137 (2005-10-01), Smith et al.
patent: 2005/0217703 (2005-10-01), O'Donnell
patent: 2005/0219481 (2005-10-01), Cox et al.
patent: 2005/0219482 (2005-10-01), Baselmans et al.
patent: 2005/0219499 (2005-10-01), Maria Zaal et al.
patent: 2005/0225737 (2005-10-01), Weissenrieder et al.
patent: 2005/0231694 (2005-10-01), Kolesnychenko et al.
patent: 2005/0237501 (2005-10-01), Furukawa et al.
patent: 2005/0243292 (2005-11-01), Baselmans et al.
patent: 2005/0245005 (2005-11-01), Benson
patent: 2005/0253090 (2005-11-01), Gau et al.
patent: 2005/0259232 (2005-11-01), Streefkerk et al.
patent: 2005/0259233 (2005-11-01), Streefkerk et al.
patent: 2005/0264778 (2005-12-01), Lof et al.
patent: 2005/0270505 (2005-12-01), Smith
patent: 2006/0209286 (2006-09-01), Nakano
patent: 221 563 (1985-04-01), None
patent: 224 448 (1985-07-01), None
patent: 0 060 729 (1982-09-01), None
patent: A 57-153433 (1982-09-01), None
patent: A 58-202448 (1983-11-01), None
patent: A 59-19912 (1984-02-01), None
patent: U 61-94342 (1986-06-01), None
patent: A 62-65326 (1987-03-01), None
patent: A 63-157419 (1988-06-01), None
patent: A 4-305915 (1992-10-01), None
patent: A 4-305917 (1992-10-01), None
patent: A 5-62877 (1993-03-01), None
patent: A 6-124873 (1994-05-01), None
patent: A 7-220990 (1995-08-01), None
patent: A 8-316125 (1996-11-01), None
patent: A 10-303114 (1998-11-01), None
patent: A 10-340846 (1998-12-01), None
patent: A 11-176727 (1999-07-01), None
patent: A 2000-58436 (2000-02-01), None
patent: WO 99/49504 (1999-09-01), None
patent: WO 02/091078 (2002-11-01), None
patent: WO 03/077037 (2003-09-01), None
patent: WO 2004/019128 (2004-03-01), None
patent: WO 2004/055803 (2004-07-01), None
patent: WO 2004/057589 (2004-07-01), None
patent: WO 2004/057590 (2004-07-01), None
patent: WO 2004/077154 (2004-09-01), None
patent: WO 2004/081666 (2004-09-01), None
patent: WO 2004/090577 (2004-10-01), None
patent: WO 2004/090633 (2004-10-01), None
patent: WO 2004/090634 (2004-10-01), None
patent: WO 2004/092830 (2004-10-01), None
patent: WO 2004/092833 (2004-10-01), None
patent: WO 2004/093130 (2004-10-01), None
patent: WO 2004/093159 (2004-10-01), None
patent: WO 2004/093160 (2004-10-01), None
patent: WO 2004/095135 (2004-11-01), None
patent: WO 2005/001432 (2005-01-01), None
patent: WO 2005/001572 (2005-01-01), None
patent: WO 2005/003864 (2005-01-01), None
patent: WO 2005/006026 (2005-01-01), None
patent: WO 2005/008339 (2005-01-01), None
patent: WO 2005/013008 (2005-02-01), None
patent: WO 2005/015283 (2005-02-01), None
patent: WO 2005/017625 (2005-02-01), None
patent: WO 2005/019935 (2005-03-01), None
patent: WO 2005/022266 (2005-03-01), None
patent: WO 2005/024325 (2005-03-01), None
patent: WO 2005/024517 (2005-03-01), None
patent: WO 2005/034174 (2005-04-01), None
patent: WO 2005/050324 (2005-06-01), None
patent: WO 2005/054953 (2005-06-01), None
patent: WO 2005/054955 (2005-06-01), None
patent: WO 2005/059617 (2005-06-01), None
patent: WO 2005/059618 (2005-06-01), None
patent: WO 2005/059645 (2005-06-01), None
patent: WO 2005/059654 (2005-06-01), None
patent: WO 2005/062128 (2005-07-01), None
patent: WO 2005/064400 (2005-07-01), None
patent: WO 2005/064405 (2005-07-01), None
patent: WO 2005/069055 (2005-07-01), None
patent: WO 2005/069078 (2005-07-01), None
patent: WO 2005/069081 (2005-07-01), None
patent: WO 2005/071491
Kim Peter B
Nikon Corporation
Oliff & Berridg,e PLC
LandOfFree
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