Optical image system surface resolution calibration method

Image analysis – Image transformation or preprocessing – Measuring image properties

Reexamination Certificate

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Details

C382S287000, C382S299000, C351S246000, C359S380000

Reexamination Certificate

active

07580590

ABSTRACT:
An optical image system surface resolution calibration method is provided herein, which utilizes a calibration standard and an image sensor device. The surface of the calibration standard is provided with a plurality of interleaving bright lines and dark lines, the calibration standard is disposed in a plane to be measured, and the image sensor device is provided with an imaging means, a memory means, and a logic-arithmetic means, that is used to fetch the image information of the calibration standard and store the image information thus obtained. Meanwhile, the image sensor device is used to select and calculate the linear equations of the bright lines, and finally calculate the magnification factor of the image fetched by the image sensor device through the geometric mathematical means by making use of the slope and intersection distance of the linear equation and the average distance between the adjacent bright lines calculated from the intersection distance.

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patent: 5967979 (1999-10-01), Taylor et al.
patent: 6320641 (2001-11-01), Bauer et al.
van der Laak et al., “Automated magnification calibration in transmission electron microscopy using Fourier analysis of replica images”, Ultramicroscopy, vol. 106, Issues 4-5, Mar. 2006, pp. 255-260.
McCaffrey et al., “A transmission electron microscope (TEM) calibration standard sample for all magnification, camera constant, and image/diffraction pattern rotation calibrations”, Microscopy Research and Technique 32, 1995, pp. 449-454.

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