Micro-electromechanical actuator

Details Micro-electromechanical actuator Micro-electromechanical actuator

2006-05-30

2009-06-09

Vortman, Anatoly (Department: 2835)

Electricity: electrothermally or thermally actuated switches

Electrothermally actuated switches

With bimetallic elements

C337S036000, C337S085000, C337S139000

Reexamination Certificate

active

07545251

ABSTRACT:
A micro-electromechanical actuator includes a pair of elongate layers capable of being heated with an electrical current to thermally expand and to perform work. A pair of spacers separates the elongate layers from each other. The spacers are arranged at respective opposite ends of the elongate layers and are fast with the layers so that the actuator is deflected when one of the layers is heated.

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Yang et al “Testing and Characterization of a Bistable Snapping Microactuator based on Thermo-mechanical Analysis” Transducers '95, Eursensors IX.

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