Method of manufacturing a magnetic head

Details Method of manufacturing a magnetic head Method of manufacturing a magnetic head

2006-01-11

2009-10-20

Landau, Matthew C (Department: 2813)

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

C438S751000, C257SE21039, C360S324000

Reexamination Certificate

active

07605006

ABSTRACT:
In forming a narrow pattern, it is difficult to form a lift-off resist pattern with an overhang shape. Accordingly, it results in a phenomenon in which the angle at the end of the GMR layer is reduced to 45° or less. It is necessary to provide a lift-off resist pattern that forms the end of the GMR film to be at an angle of as abrupt as 45° or more and ensures lift-off. According to one embodiment of the invention, a method of manufacturing a thin film magnetic head of using a resist pattern comprises three-layered organic films of a PMGI layer, an organic film layer and an image layer from the lower layer as a lift-off resist pattern, etching the organic film layer and the PMGI layer by using the imaging layer as a mask, then etching a GMR layer by using, as a mask, a lift-off resist pattern in which the organic film layer and the imaging layer are formed into the overhang shape prepared by etching the PMGI layer in a developer solution, and then forming a magnetic domain control film and an electrode film on both ends of the GMR layer by using a lift-off method.

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