Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Reexamination Certificate
2007-02-01
2009-12-15
Nhu, David (Department: 2895)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
C257S288000, C257S352000, C257SE21580, C257SE21127, C257SE21154, C257SE21351
Reexamination Certificate
active
07633131
ABSTRACT:
A semiconductor sensor device is formed using MEMS technology by placing a thin layer of single-crystal silicon, which includes semiconductor devices, over a cavity, which has been formed in a semiconductor material. The thin layer of single-crystal silicon can be formed by forming the semiconductor devices in the top surface of a single-crystal silicon wafer, thinning the silicon wafer to a desired thickness, and then dicing the thinned wafer to form silicon layers of a desired size. The MEMS device can be used to implement a pressure sensor, microphone, temperature sensor, and a joystick.
REFERENCES:
patent: 4790192 (1988-12-01), Knecht et al.
patent: 5702619 (1997-12-01), Kurtz et al.
patent: 6084257 (2000-07-01), Petersen et al.
patent: 6279402 (2001-08-01), Fisher
patent: 6316796 (2001-11-01), Petersen et al.
patent: 6378378 (2002-04-01), Fisher
patent: 7192819 (2007-03-01), Padmanabhan et al.
Karl Behringer, University of Washington, “EE 539 Tm/M(S)E 599 Tm, Lecture B2, Micro/Nano/MEMS”, Spring 2003, [online], [retrieved on Jun. 28, 2004]. Retrieved from the Internet: <URL:http://courses.washington.edu/mengr599/tm—taya
otes/b2.pdf>. pp. 1-10 (unnumbered).
Padmanabhan Gobi R.
Yegnashankaran Visvamohan
National Semiconductor Corporation
Nhu David
Pickering Mark C.
LandOfFree
MEMS semiconductor sensor device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with MEMS semiconductor sensor device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS semiconductor sensor device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4088348