Inlaid polishing pad

Details Inlaid polishing pad Inlaid polishing pad

2007-02-15

2009-10-20

Nguyen, Dung Van (Department: 3723)

Abrading

Flexible-member tool, per se

Interrupted or composite work face

C451S533000, C451S528000

Reexamination Certificate

active

07604530

ABSTRACT:
A surface treatment or a two-step injection molding is used to make an inlaid polishing pad. A surface of the inlaid polishing pad has areas of different rigidity to control the rigidity and compressibility of the inlaid polishing pad. Furthermore, methods of making such an inlaid polishing pads are also disclosed.

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