Radiant energy – Photocells; circuits and apparatus
Reexamination Certificate
2006-02-10
2009-02-24
Porta, David P (Department: 2884)
Radiant energy
Photocells; circuits and apparatus
C356S216000, C356S213000, C250S336100
Reexamination Certificate
active
07495199
ABSTRACT:
A radiometer sensor includes a target plate and a micro-mechanical spring which supports the target plate above a base support. This construction allows for displacement of the target plate in a direction perpendicular to the base support in response to radiation which is received by a top surface of the target plate. The sensor is enclosed within a housing that defines a sealed interior chamber within which a vacuum has been drawn. The target plate preferably is non-deformable in response to received radiation. Capacitive or piezoelectric sensors are provided to detect the displacement of the target plate, and the measured displacement is correlated to determine a received radiation level. Radiometer sensor output signals are quantized and signal processed so as to make a radiation level determination.
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Green Yara N
Jorgenson Lisa K.
Porta David P
STMicroelectronics Inc.
Szuwalski Andre M.
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