Piezoelectric filter, antenna duplexer, and communications...

Wave transmission lines and networks – Plural channel systems – Having branched circuits

Reexamination Certificate

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C333S189000, C310S349000

Reexamination Certificate

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07639103

ABSTRACT:
A piezoelectric filter comprises a substrate and a plurality of piezoelectric resonators provided on the same substrate. Each piezoelectric resonator comprises a cavity formed in the substrate, a lower electrode formed on the substrate, covering the cavity, a piezoelectric material layer formed on the lower electrode, and an upper electrode formed on the piezoelectric material layer. At least one of the piezoelectric resonators has a cavity formed of a plurality of cells.

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patent: 6388544 (2002-05-01), Ella
patent: 6556103 (2003-04-01), Shibata et al.
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patent: 7271684 (2007-09-01), Nishihara et al.
patent: 7474174 (2009-01-01), Milsom et al.
patent: 2006/0164187 (2006-07-01), Hong et al.
patent: 2007/0194863 (2007-08-01), Shibata et al.
patent: 05-183380 (1993-07-01), None
patent: 2002-359534 (2002-12-01), None
patent: 2004-173191 (2004-06-01), None
patent: 2006-211644 (2006-08-01), None

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