Plurality of hidden hinges for mircromirror device

Details Plurality of hidden hinges for mircromirror device Plurality of hidden hinges for mircromirror device

2007-08-18

2009-10-20

Thompson, Timothy J (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000

Reexamination Certificate

active

07605971

ABSTRACT:
A mirror device comprises plural mirror elements, each of which comprises a mirror for reflecting illumination light emitted from a light source, a hinge for supporting the mirror placed on a substrate, a hinge structural body for supporting the hinge, and electrodes for controlling a deflection direction of the mirror placed on the substrate, and in each of which the hinge is placed so as to traverse the edge of the mirror or the border with an adjacent mirror. Also enabled is a configuration of a projection apparatus, which comprises the mirror device.

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