Optical waveguides – Integrated optical circuit
Reexamination Certificate
2008-06-27
2009-12-08
Petkovsek, Daniel (Department: 2874)
Optical waveguides
Integrated optical circuit
C385S001000, C385S003000, C385S131000, C216S002000
Reexamination Certificate
active
07630596
ABSTRACT:
A silicon structure includes a silicon substrate; and an on-substrate structure including a silicon compound film and formed on said silicon substrate. At least one removal section removed through anisotropic etching and at least one supporting column left through the anisotropic etching to support said on-substrate structure are provided for a direct lower portion of said silicon substrate directly beneath said on-substrate structure.
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European Search Report for Application No. EP 08159202.4 completed Oct. 9, 2008.
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