Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2006-05-02
2009-10-20
Hassanzadeh, Parviz (Department: 1792)
Coating apparatus
Gas or vapor deposition
With treating means
C118S7230ER, C118S7230ME, C118S7230ER, C156S345360, C156S345410
Reexamination Certificate
active
07603963
ABSTRACT:
An apparatus and method for initiating a process gas plasma. A conductive plate having a plurality of conductive fingers is positioned in a microwave applicator. An arc forms between the conductive fingers to initiate the formation of a plasma. A transport mechanism may convey process materials through the plasma. A spray port may be provided to expel processed materials.
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Morrell Jonathan S.
Ripley Edward B.
Seals Roland D.
Babcock & Wilcox Technical Services Y-12, LLC
Dhingra Rakesh K
Hassanzadeh Parviz
Luedeka Neely & Graham P.C.
Renner Michael J.
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