Optical image measuring apparatus and optical image...

Details Optical image measuring apparatus and optical image... Optical image measuring apparatus and optical image...

2005-10-11

2009-02-17

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07492466

ABSTRACT:
Provided is an optical image measuring apparatus forming a three-dimensional image based on tomographic images of an object, acquired at various depths even when the object moves during measurement. Including a half mirror (6) for dividing a light beam signal light (S) and reference light (R), a frequency shifter (8), a reference mirror (9) and a piezoelectric element (9A) used to change an optical path length of the reference light (R), CCDs (21, 22) for receiving interference light beams (L) resulting from interference light produced by superimposing the signal light (S) and the reference light (R) on each other by the half mirror (6) and outputting detection signals, an image forming portion for forming tomographic images based on the detection signals, a measurement depth calculating means (53), and an image processing portion (57). Forming a three-dimensional image or the like based on the arranged tomographic images.

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