Automatic material handling system, production system for...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C700S121000, C414S762000, C073S114310

Reexamination Certificate

active

07574280

ABSTRACT:
It is an object to provide an AGV that enables preventing a substrate and a manufacturing system from being contaminated due to another substrate with an adhering contaminant generated in a manufacturing process, and also a production system for a semiconductor device and a production management method for a semiconductor device, which use the AGV.In the present invention, air filtered through a filter is introduced into a containing portion of an AGV, and air in the containing portion containing a carrier is exhausted after filtering the air in the containing portion through another filter. As the filter used before discharging the air, a filter that enables filtering an impurity on the order of a submicron level is used. In addition, a carrier used before doping is changed to another carrier after doping, and CIM system is used to control driving of the AGV and selection of the carrier.

REFERENCES:
patent: 5399531 (1995-03-01), Wu
patent: 6449530 (2002-09-01), Yamada et al.
patent: 6517304 (2003-02-01), Matsumoto
patent: 6547953 (2003-04-01), Suzuki et al.
patent: 6558962 (2003-05-01), Nishiki
patent: 6770109 (2004-08-01), Tanaka et al.
patent: 6795745 (2004-09-01), Ueno et al.
patent: 6826441 (2004-11-01), Yamagishi
patent: 2004/0017556 (2004-01-01), Nakahara
patent: 63-133643 (1988-06-01), None
patent: 06-140496 (1994-05-01), None
patent: 06-291172 (1994-10-01), None
patent: 11-147051 (1999-06-01), None
patent: 11-301475 (1999-11-01), None
patent: 11-322068 (1999-11-01), None
patent: 2000-021891 (2000-01-01), None
patent: 2000-157810 (2000-06-01), None
patent: 2001-267395 (2001-09-01), None
patent: WO 02/21583 (2002-03-01), None

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Automatic material handling system, production system for... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Automatic material handling system, production system for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Automatic material handling system, production system for... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4062607

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.