Circuitry and gate stacks

Details Circuitry and gate stacks Circuitry and gate stacks

2000-04-26

2009-08-18

Jackson, Jr., Jerome (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

C257SE29156, C438S585000

Reexamination Certificate

active

07576400

ABSTRACT:
The present invention includes semiconductor circuitry. Such circuitry encompasses a metal silicide layer over a substrate and a layer comprising silicon, nitrogen and oxygen in physical contact with the metal silicide layer. The present invention also includes a gate stack which encompasses a polysilicon layer over a substrate, a metal silicide layer over the polysilicon layer, an antireflective material layer over the metal silicide layer, a silicon nitride layer over the antireflective material layer, and a layer of photoresist over the silicon nitride layer, for photolithographically patterning the layer of photoresist to form a patterned masking layer from the layer of photoresist and transferring a pattern from the patterned masking layer to the silicon nitride layer, antireflective material layer, metal silicide layer and polysilicon layer. The patterned silicon nitride layer, antireflective material layer, metal silicide layer and polysilicon layer encompass a gate stack.

REFERENCES:
patent: 4158717 (1979-06-01), Nelson
patent: 4444617 (1984-04-01), Whitcomb
patent: 4474975 (1984-10-01), Clemons et al.
patent: 4523214 (1985-06-01), Hirose et al.
patent: 4552783 (1985-11-01), Stoll et al.
patent: 4562091 (1985-12-01), Sachdev et al.
patent: 4592129 (1986-06-01), Legge
patent: 4600671 (1986-07-01), Saitoh et al.
patent: 4648904 (1987-03-01), Depasquale et al.
patent: 4695859 (1987-09-01), Guha et al.
patent: 4702936 (1987-10-01), Maeda et al.
patent: 4755478 (1988-07-01), Abernathey et al.
patent: 4764247 (1988-08-01), Leveriza et al.
patent: 4805683 (1989-02-01), Magdo et al.
patent: 4833096 (1989-05-01), Huang et al.
patent: 4863755 (1989-09-01), Hess et al.
patent: 4870470 (1989-09-01), Bass, Jr. et al.
patent: 4905073 (1990-02-01), Chen et al.
patent: 4907064 (1990-03-01), Yamazaki et al.
patent: 4910160 (1990-03-01), Jennings et al.
patent: 4940509 (1990-07-01), Tso et al.
patent: 4954867 (1990-09-01), Hosaka
patent: 4971655 (1990-11-01), Stefano et al.
patent: 4992306 (1991-02-01), Hochberg et al.
patent: 5034348 (1991-07-01), Hartswick et al.
patent: 5036383 (1991-07-01), Mori
patent: 5061509 (1991-10-01), Naito et al.
patent: 5140390 (1992-08-01), Li et al.
patent: 5219613 (1993-06-01), Fabry et al.
patent: 5234869 (1993-08-01), Mikata et al.
patent: 5244537 (1993-09-01), Ohnstein
patent: 5260600 (1993-11-01), Harada
patent: 5270267 (1993-12-01), Ouellet
patent: 5286661 (1994-02-01), de Fresart et al.
patent: 5302366 (1994-04-01), Schuette et al.
patent: 5312768 (1994-05-01), Gonzalez
patent: 5314724 (1994-05-01), Tsukune et al.
patent: 5340621 (1994-08-01), Matsumoto et al.
patent: 5356515 (1994-10-01), Tahara et al.
patent: 5376591 (1994-12-01), Maeda et al.
patent: 5405489 (1995-04-01), Kim et al.
patent: 5413963 (1995-05-01), Yen et al.
patent: 5429987 (1995-07-01), Allen
patent: 5439838 (1995-08-01), Yang
patent: 5441797 (1995-08-01), Hogan et al.
patent: 5461003 (1995-10-01), Havemann et al.
patent: 5470772 (1995-11-01), Woo
patent: 5472827 (1995-12-01), Ogawa et al.
patent: 5472829 (1995-12-01), Ogawa
patent: 5482894 (1996-01-01), Havemann
patent: 5498555 (1996-03-01), Lin
patent: 5536857 (1996-07-01), Narula et al.
patent: 5541445 (1996-07-01), Quellet
patent: 5543654 (1996-08-01), Dennen
patent: 5554567 (1996-09-01), Wang
patent: 5591494 (1997-01-01), Sato et al.
patent: 5591566 (1997-01-01), Ogawa
patent: 5593741 (1997-01-01), Ikeda
patent: 5600165 (1997-02-01), Tsukamoto et al.
patent: 5605601 (1997-02-01), Kawasaki
patent: 5639687 (1997-06-01), Roman et al.
patent: 5639689 (1997-06-01), Woo
patent: 5641607 (1997-06-01), Ogawa et al.
patent: 5648202 (1997-07-01), Ogawa et al.
patent: 5652187 (1997-07-01), Kim et al.
patent: 5653619 (1997-08-01), Cloud et al.
patent: 5656330 (1997-08-01), Niiyama et al.
patent: 5656337 (1997-08-01), Park et al.
patent: 5661093 (1997-08-01), Ravi et al.
patent: 5667015 (1997-09-01), Harestad et al.
patent: 5670297 (1997-09-01), Ogawa et al.
patent: 5674356 (1997-10-01), Nagayama
patent: 5677015 (1997-10-01), Hasegawa
patent: 5677111 (1997-10-01), Ogawa
patent: 5691212 (1997-11-01), Tsai et al.
patent: 5698352 (1997-12-01), Ogawa et al.
patent: 5709741 (1998-01-01), Akamatsu et al.
patent: 5710067 (1998-01-01), Foote et al.
patent: 5711987 (1998-01-01), Bearinger et al.
patent: 5731242 (1998-03-01), Parat et al.
patent: 5741721 (1998-04-01), Stevens
patent: 5744399 (1998-04-01), Rostoker et al.
patent: 5747388 (1998-05-01), Küsters et al.
patent: 5750442 (1998-05-01), Juengling
patent: 5753320 (1998-05-01), Mikoshiba et al.
patent: 5759755 (1998-06-01), Park et al.
patent: 5780891 (1998-07-01), Kauffman et al.
patent: 5783493 (1998-07-01), Yeh et al.
patent: 5786039 (1998-07-01), Brouquet
patent: 5792689 (1998-08-01), Yang et al.
patent: 5800877 (1998-09-01), Maeda et al.
patent: 5801399 (1998-09-01), Hattori et al.
patent: 5807660 (1998-09-01), Lin et al.
patent: 5817549 (1998-10-01), Yamazaki et al.
patent: 5831321 (1998-11-01), Nagayama
patent: 5838052 (1998-11-01), McTeer
patent: 5840610 (1998-11-01), Gilmer et al.
patent: 5858880 (1999-01-01), Dobson et al.
patent: 5872035 (1999-02-01), Kim et al.
patent: 5872385 (1999-02-01), Taft et al.
patent: 5874367 (1999-02-01), Dobson
patent: 5883011 (1999-03-01), Lin et al.
patent: 5883014 (1999-03-01), Chen et al.
patent: 5924000 (1999-07-01), Linliu
patent: 5933721 (1999-08-01), Hause et al.
patent: 5948482 (1999-09-01), Brinker et al.
patent: 5956605 (1999-09-01), Akram et al.
patent: 5960289 (1999-09-01), Tsui et al.
patent: 5962581 (1999-10-01), Hayase et al.
patent: 5968324 (1999-10-01), Cheung et al.
patent: 5968611 (1999-10-01), Kaloyeros et al.
patent: 5981368 (1999-11-01), Gardner et al.
patent: 5985519 (1999-11-01), Kakamu et al.
patent: 5986318 (1999-11-01), Kim et al.
patent: 5994217 (1999-11-01), Ng
patent: 5994730 (1999-11-01), Shrivastava et al.
patent: 6001741 (1999-12-01), Alers
patent: 6001747 (1999-12-01), Annapragada
patent: 6004850 (1999-12-01), Lucas et al.
patent: 6008121 (1999-12-01), Yang et al.
patent: 6008124 (1999-12-01), Sekiguchi et al.
patent: 6017779 (2000-01-01), Miyasaka
patent: 6020243 (2000-02-01), Wallace et al.
patent: 6022404 (2000-02-01), Ettlinger et al.
patent: 6028015 (2000-02-01), Wang et al.
patent: 6030901 (2000-02-01), Hopper et al.
patent: 6040619 (2000-03-01), Wang et al.
patent: 6054379 (2000-04-01), Yau et al.
patent: 6057217 (2000-05-01), Uwsawa
patent: 6060765 (2000-05-01), Maeda
patent: 6060766 (2000-05-01), Mehta et al.
patent: 6071799 (2000-06-01), Park et al.
patent: 6072227 (2000-06-01), Yau et al.
patent: 6087064 (2000-07-01), Lin et al.
patent: 6087267 (2000-07-01), Dockrey et al.
patent: 6096656 (2000-08-01), Matzke et al.
patent: 6114255 (2000-09-01), Juengling
patent: 6121133 (2000-09-01), Iyer et al.
patent: 6124641 (2000-09-01), Matsuura
patent: 6130168 (2000-10-01), Chu et al.
patent: 6133096 (2000-10-01), Su et al.
patent: 6133613 (2000-10-01), Yao et al.
patent: 6133618 (2000-10-01), Steiner
patent: 6136636 (2000-10-01), Wu
patent: 6140151 (2000-10-01), Akram
patent: 6140677 (2000-10-01), Gardner et al.
patent: 6143670 (2000-11-01), Cheng et al.
patent: 6144083 (2000-11-01), Yin
patent: 6153504 (2000-11-01), Shields et al.
patent: 6156674 (2000-12-01), Li et al.
patent: 6159804 (2000-12-01), Gardner et al.
patent: 6159871 (2000-12-01), Loboda et al.
patent: 6184151 (2001-02-01), Adair et al.
patent: 6184158 (2001-02-01), Shufflebotham et al.
patent: 6187657 (2001-02-01), Xiang et al.
patent: 6187694 (2001-02-01), Cheng et al.
patent: 6198144 (2001-03-01), Pan et al.
patent: 6200835 (2001-03-01), Manning
patent: 6204168 (2001-03-01), Naik et al.
patent: 6207587 (2001-03-01), Li et al.
patent: 6209484 (2001-04-01), Huang et al.
patent: 6218292 (2001-04-01), Foote
patent: 6225217 (2001-05-01), Usami et al.
patent: 6225671 (2001-05-01), Yin
patent: 6235568 (2001-05-01), Murthy et al.
patent: 6235591 (2001-05-01), Balasubramanian et al.
patent: 6238976 (2001-05-01), Noble et al.
patent: 6268282 (2001-07-01), Sandhu et al.
patent: 6284677 (2001-09-01), Hsiao et al.
patent: 6313018 (2001-11-01), Wang et al.
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