Apparatus for measuring defects in a glass sheet

Details Apparatus for measuring defects in a glass sheet Apparatus for measuring defects in a glass sheet

2007-02-21

2009-08-04

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S513000

Reexamination Certificate

active

07570366

ABSTRACT:
A method of measuring the topography of a large, thin, non-flat specular substrate in a production environment with minimal movement of a majority of the measurement apparatus. A gimbal-mounted reflecting element is used to steer a short coherence length probe beam such that the probe beam is substantially perpendicular to a local surface of the substrate. The probe beam and the reference beam are combined and the resulting interference pattern used to characterize defects on the local surface.

REFERENCES:
patent: 5260761 (1993-11-01), Barker
patent: 5600440 (1997-02-01), Bendall
patent: 5706085 (1998-01-01), Blossey et al.
patent: 6377349 (2002-04-01), Fercher
patent: 6493094 (2002-12-01), Prikryl et al.
patent: 6631226 (2003-10-01), Schoeppe et al.
patent: 6741359 (2004-05-01), Wei et al.
patent: 6788421 (2004-09-01), Fercher et al.
patent: 6922250 (2005-07-01), Fercher
patent: 6924898 (2005-08-01), Deck
patent: 7057737 (2006-06-01), Millerd et al.
patent: 7145661 (2006-12-01), Hitzenberger
patent: 2002/0180869 (2002-12-01), Callison et al.
patent: 2004/0181362 (2004-09-01), Brose et al.
patent: 2005/0046863 (2005-03-01), Millerd et al.
patent: 2005/0046865 (2005-03-01), Brock et al.
patent: 10-221009 (1998-08-01), None
patent: 2000-121317 (2000-04-01), None
patent: 2005/052502 (2005-06-01), None

Affiliated with

Also associated with

Rating

Apparatus for measuring defects in a glass sheet does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for measuring defects in a glass sheet, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for measuring defects in a glass sheet will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4058178