Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-12-21
2009-06-09
Stultz, Jessica T (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000
Reexamination Certificate
active
07545556
ABSTRACT:
Disclosed are methods and systems for testing MEMS devices (e.g., interferometric modulators) so as to induce a moveable element to move from a first position to a second position and to detect the movement. The methods include applying an electrical current to the movable element in the presence of a magnetic field, thereby producing a Lorentz force on the movable element. The force required to move the movable element from the first position to the second position can then be estimated based on the magnitudes and geometric relationships of the electrical current and the magnetic field, and the geometry of the movable element. In some embodiments, the first position may be a movable element adhered to another surface (e.g., a layer on a substrate) due to stiction forces. In these embodiments, the stiction forces can be estimated. In other embodiments, the first position may be a relaxed position, where the movable element is spaced a first distance from a substrate, and the second position may be a second distance from the substrate and/or contacting the substrate. In these embodiments, the springiness (e.g., a spring constant) of support structures supporting the movable element can be estimated.
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Knobbe Martens Olson & Bear LLP
Qualcomm Mems Technologies, Inc.
Sahle Mahidere S
Stultz Jessica T
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