Seek-scan probe (SSP) including see-saw scan probe with...

Details Seek-scan probe (SSP) including see-saw scan probe with... Seek-scan probe (SSP) including see-saw scan probe with...

2006-12-21

2009-11-24

Kebede, Brook (Department: 2894)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

C257S415000, C257S448000, C438S052000

Reexamination Certificate

active

07622780

ABSTRACT:
An apparatus comprising a substrate having a probe suspension formed thereon, a see-saw probe coupled to the probe suspension, the see-saw probe including first and second ends, with a tip projecting from a side of the first end, and an actuation electrode formed on the substrate, the actuation electrode positioned to exert a force upon the second end of the see-saw probe. A process comprising forming a probe suspension on a substrate, coupling a see-saw probe to the probe suspension, the see-saw probe including first and second ends, with a tip projecting from a side of the first end, and forming an actuation electrode on the substrate, the actuation electrode positioned to exert a force upon the second end of the see-saw probe.

REFERENCES:
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