Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2007-07-21
2009-06-23
Pham, Thanh V (Department: 2894)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S095000, C257SE21068, C257SE21662, C257SE21679, C711S101000, C711S102000, C711S103000
Reexamination Certificate
active
07550313
ABSTRACT:
A method for forming a Phase Change Material (PCM) cell structure comprises forming both a lower electrode composed of a PCM layer and a conductive encapsulating upper electrode layer. The PCM is protected from damage by a conductive encapsulating layer. Electrical isolation between adjacent cells is provided by modifying the conductivity of both the PCM layer and the conductive encapsulating upper electrode layer subsequent to deposition thereof, thereby forming high electrical resistance regions between the cells.
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Arnold John Christopher
Breen Carmichael Tricia
International Business Machines - Corporation
Jones II Graham S.
Morris Daniel P.
Pham Thanh V
Trepp Robert M.
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