Substrate inspection device

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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Details

C382S149000, C382S151000

Reexamination Certificate

active

07639860

ABSTRACT:
In the substrate inspection apparatus2for inspecting a formation state of the pattern area20formed on the printed circuit board1, since the inside area data generation means7for generating inspection data of the inside area21bof the pattern area20to be inspected, the outside area data generation means10for generating inspection data in the ring-shaped area22bof the outside, and the inside/outside determination means9and11for determining whether the pattern area is defective or not defective by comparing the generated inside area data and the outside area data with the predetermined reference data are provided, by applying a relaxed inspection reference to the inside of the pattern area20where a relatively large defect is allowed and applying a strict inspection reference to the outside of the pattern area20where even a fine defect is not allowed, it is possible to adequately detect a defect.

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