Thermal measuring and testing – Temperature measurement – By electrical or magnetic heat sensor
Reexamination Certificate
2005-06-17
2009-10-20
Verbitsky, Gail (Department: 2855)
Thermal measuring and testing
Temperature measurement
By electrical or magnetic heat sensor
C374S163000, C374S208000, C374S183000, C136S200000, C136S232000
Reexamination Certificate
active
07604401
ABSTRACT:
A substrate temperature measurement apparatus and a processing apparatus, whereby thermocouple wire reliability is improved, influence of infrared rays on the chip is reduced and the temperature of the substrate can be accurately measured. A chip (16) made of metal material reflecting infrared rays and electromagnetic waves, has an insertion opening (16a) for inserting thermocouple wires (20a, 20b) is crushed and deformed with the thermocouple wires inserted, and thereby united together with the thermocouple wires, and contacted with the substrate (13); and a supporting member or members (15b,15c), made of material of lower thermal conductivity than said chip (16), are provided for supporting said chip (16).
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Carothers & Carothers
UL Vac, Inc.
Verbitsky Gail
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