Microelectromechanical modulation device and...

Details Microelectromechanical modulation device and... Microelectromechanical modulation device and...

2005-09-30

2008-12-23

Choi, William C (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S223100, C359S225100

Reexamination Certificate

active

07468829

ABSTRACT:
A microelectromechanical modulation device comprising: a movable portion, which is supported to be elastically and bi-directionally displaced and which has a modulation function; and a plurality of driving sources operative to apply a physical action force to said movable portion, wherein when said movable portion is displacement-driven in a first direction, a physical action force for suppressing oscillation of said movable portion is applied to said movable portion in a second direction different from the first direction by said drive sources while said movable portion is transited in the first direction.

REFERENCES:
patent: 6661561 (2003-12-01), Fitzpatrick et al.
patent: 6972883 (2005-12-01), Fujii et al.
patent: 7099065 (2006-08-01), Patel et al.
patent: 8-334709 (1996-12-01), None
patent: 2001-174720 (2001-06-01), None
patent: 2002-36197 (2002-02-01), None
patent: 2002-169109 (2002-06-01), None

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