Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2005-06-08
2008-12-02
Fuller, Rodney E (Department: 2862)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
07460207
ABSTRACT:
An exposure apparatus, wherein an exposure of a substrate (P) is carried out by filling at least a portion of the space between a projection optical system and the substrate (P) with a liquid and projecting an image of a pattern onto the substrate (P) via the projection optical system and the liquid, includes a bubble detector (20) which detects air bubble or bubbles in the liquid between the projection optical system and the substrate (P). Consequently, the exposure apparatus is capable of suppressing deterioration of a pattern image caused by bubbles in the liquid when an exposure is carried out while filling the space between the projection optical system and the substrate with the liquid.
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Magome Nobutaka
Mizutani Hideo
Fuller Rodney E
Nikon Corporation
Oliff & Berridg,e PLC
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